Pemanas untuk mengeringkan wafer sensor MEMS

Mon, 27 Jul 2026 17:04:12 +0800

Berhentilah memanaskan mesin tersebut, mulailah mengeringkan wafernya saja. Jika Anda pernah bekerja di bidang fabrikasi MEMS, pasti Anda tahu betapa sulitnya proses pengeringan wafer. Kita harus terus-menerus berjuang melawan sisa-sisa zat yang menempel pada permukaan wafer.

Cara lama, yaitu menggunakan oven konveksi biasa, ternyata tidak efektif. Metode ini menyebabkan seluruh bagian ruangan menjadi panas. Hal ini merupakan pemborosan energi, dan juga membuat permukaan peralatan menjadi sangat panas. Tidak jarang dinding mesin menjadi begitu panas sehingga bisa melukai orang yang berada di sekitarnya.

Lampu pengering semikonduktor organik

Tue, 02 Jun 2026 04:14:08 +0800

On the lithography floor, you don’t get much wiggle room between soft bake and hard bake. A half-degree drift can move photoresist thickness, shift critical dimension bias, and suddenly your yield is off the spec sheet. We built an organic semiconductor drying lamp to tighten that window and keep the process from walking away.
What matters under the hood
It hits the wafer with NIR and keeps the spectrum under control, so you get fast, non-contact heating. Across the exposure field, wafer-level thermal uniformity holds at ±0.1°C—every die sees the same thermal budget. It runs in Class 1–100 cleanrooms without shedding particles, and output stays steady over 5,000+ hours, dropping less than 5%. Run-to-run, photoresist bake temperature repeatability is solid, and the system keeps going 24/7 with no unplanned downtime.
Why it fits the process
This is the kind of tool you reach for when the recipe is touchy. Soft bake sets the solvent profile, hard bake locks in adhesion and etch selectivity, and any thermal non-uniformity shows up as linewidth variation after the etch. The lamp shortens the thermal ramp, keeps stress off the stack, and makes cycle time predictable. It draws less energy than convection ovens, and the footprint drops right into existing coat/bake tracks without tearing up the line layout.
What you need to watch
Installation means matching the lamp to the chamber geometry and confirming the interface connector type. The lamp doesn’t like reflective surfaces, so shielding and alignment have to be checked during qualification. Once it’s dialed in, it runs with minimal tuning—just keep coolant temperature stable and stick to the preventive maintenance schedule.

Pengeringan on Eco-Friendly Warm IR Heaters

Pemanas untuk mengeringkan wafer sensor MEMS

Lampu pengering semikonduktor organik